Relevant time durations for modern science range from the femtosecond of very fast electronics to the age of the universe, 15 billion years. This corresponds to a range of about 32 orders of magnitude. Moreover, this variable can be controlled and measured with an accuracy better than 10−14 by modern atomic clocks. However, the accuracy that can be obtained by purely electronic circuits, such as integrated circuits, is only of the order of 10−3. This is because there is no combination of available electronic components (like a RC time constant for example) that is more precise and constant with time and temperature. Now, 10−3 corresponds to an error of about 1.5 minute per day, which is totally unacceptable for timekeeping applications. The same is true for applications to modern telecommunications, which exploits the frequency spectrum up to 300Ghz.
Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.