CCD Image Sensors in Deep-Ultraviolet : Degradation Behavior and Damage Mechanisms / by Flora M. Li, Arokia Nathan.
章节:
1.CCD Image Sensors
2.Instabilities in Si, SiO2, and the Si-SiO2 Interface
3.Effects of Radiation on the Si-SiO2 System
4.Interaction of UV Radiation with the Si-SiO2 System
5.Interaction of DUV Radiation with CCD Sensors
6.Concluding Remarks & Future Research
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