silvaco中如何修改能明显改善深紫外的光电性能（程序）

王与冠 2019-05-16 11:18:59

# (c) Silvaco Inc., 2015 go atlas set Al_b=0.6 set Al_w=0.5 set Al_np = 0.65 set Al_EBL=0.75 set Al_In=0.87 set width_w=0.003 set width_b=0.008 set width_In=0.002 set width_MQW=$width_w*5+$width_b*6+$width_In*12 set width_EBL=0.02 set width_p_u=0.1 set width_p_l=0.03 mesh width=1.13e4 # x.mesh loc=0.0 spac=0.5 x.mesh loc=1.0 spac=0.5 # set width_p-GaN=0.1 y.mesh loc=0.0 spac=0.05 y.mesh loc=0.1 spac=0.001 # set width_p-AlGaN y.mesh loc=0.1+$width_p_u spac=0.0001 y.mesh loc=0.1+$width_p_u+$width_EBL spac=0.0001 y.mesh loc=0.1+$width_p_u+$width_EBL+$width_p_l spac=0.0001 # set width_MQW y.mesh loc=0.1+$width_p_u+$width_EBL+$width_p_l+$width_MQW spac=0.0001 #set n-AlGaN_width=2 y.mesh loc=2.1+$width_p_u+$width_EBL+$width_p_l+$width_MQW spac=0.01 # p-GaN region number=1 y.min=0 y.max=0.1 material=GaN # p-AlGaN region number=2 y.min=0.1 y.max=0.1+$width_p_u material=AlGaN x.comp=$Al_np name=npregion region number=3 y.min=0.1+$width_p_u y.max=0.1+$width_p_u+$width_EBL material=AlGaN x.comp=$Al_EBL region number=4 y.min=0.1+$width_p_u+$width_EBL y.max=0.1+$width_p_u+$width_EBL+$width_p_l material=AlGaN x.comp=$Al_np name=npregion # MQW region number=5 y.min=0.1+$width_p_u+$width_EBL+$width_p_l y.max=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*1+$width_b material=AlGaN x.comp=$Al_b name=barrier region number=6 y.min=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*1+$width_b y.max=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*2+$width_b material=InAlN x.comp=$Al_In name=barrier_In region number=7 y.min=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*2+$width_b y.max=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*2+$width_b+$width_w material=AlGaN x.comp=$Al_w name=well led qwell region number=8 y.min=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*2+$width_b+$width_w y.max=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*3+$width_b+$width_w material=InAlN x.comp=$Al_In name=barrier_In region number=9 y.min=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*3+$width_b+$width_w y.max=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*3+$width_b*2+$width_w material=AlGaN x.comp=$Al_b name=barrier region number=10 y.min=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*3+$width_b*2+$width_w y.max=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*4+$width_b*2+$width_w material=InAlN x.comp=$Al_In name=barrier_In region number=11 y.min=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*4+$width_b*2+$width_w y.max=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*4+$width_b*2+$width_w*2 material=AlGaN x.comp=$Al_w name=well led qwell region number=12 y.min=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*4+$width_b*2+$width_w*2 y.max=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*5+$width_b*2+$width_w*2 material=InAlN x.comp=$Al_In name=barrier_In region number=13 y.min=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*5+$width_b*2+$width_w*2 y.max=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*5+$width_b*3+$width_w*2 material=AlGaN x.comp=$Al_b name=barrier region number=14 y.min=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*5+$width_b*3+$width_w*2 y.max=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*6+$width_b*3+$width_w*2 material=InAlN x.comp=$Al_In name=barrier_In region number=15 y.min=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*6+$width_b*3+$width_w*2 y.max=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*6+$width_b*3+$width_w*3 material=AlGaN x.comp=$Al_w name=well led qwell region number=16 y.min=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*6+$width_b*3+$width_w*3 y.max=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*7+$width_b*3+$width_w*3 material=InAlN x.comp=$Al_In name=barrier_In region number=17 y.min=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*7+$width_b*3+$width_w*3 y.max=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*7+$width_b*4+$width_w*3 material=AlGaN x.comp=$Al_b name=barrier region number=18 y.min=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*7+$width_b*4+$width_w*3 y.max=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*8+$width_b*4+$width_w*3 material=InAlN x.comp=$Al_In name=barrier_In region number=19 y.min=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*8+$width_b*4+$width_w*3 y.max=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*8+$width_b*4+$width_w*4 material=AlGaN x.comp=$Al_w name=well led qwell region number=20 y.min=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*8+$width_b*4+$width_w*4 y.max=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*9+$width_b*4+$width_w*4 material=InAlN x.comp=$Al_In name=barrier_In region number=21 y.min=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*9+$width_b*4+$width_w*4 y.max=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*9+$width_b*5+$width_w*4 material=AlGaN x.comp=$Al_b name=barrier region number=22 y.min=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*9+$width_b*5+$width_w*4 y.max=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*10+$width_b*5+$width_w*4 material=InAlN x.comp=$Al_In name=barrier_In region number=23 y.min=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*10+$width_b*5+$width_w*4 y.max=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*10+$width_b*5+$width_w*5 material=AlGaN x.comp=$Al_w name=well led qwell region number=24 y.min=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*10+$width_b*5+$width_w*5 y.max=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*11+$width_b*5+$width_w*5 material=InAlN x.comp=$Al_In name=barrier_In region number=25 y.min=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*11+$width_b*5+$width_w*5 y.max=0.1+$width_p_u+$width_EBL+$width_p_l+$width_In*12+$width_b*6+$width_w*5 material=AlGaN x.comp=$Al_b name=barrier # set width_n-AlGaN=2 region number=26 y.min=0.1+$width_p_u+$width_EBL+$width_p_l+$width_MQW y.max=2.1+$width_p_u+$width_EBL+$width_p_l+$width_MQW material=AlGaN x.comp=$Al_np name=npregion substrate # electrode name=anode top electrode name=cathode bottom # doping region=1 uniform p.type conc=4e19 doping region=2 uniform p.type conc=8e19 doping region=3 uniform p.type conc=8e19 doping region=4 uniform p.type conc=8e19 # doping 5~25 intrinsic doping region=26 uniform n.type conc=5e18 # models polarization calc.strain polar.scale=-0.8 material material=GaN taun0=1e-8 taup0=1e-8 copt=1.1e-8 \ augn=1.0e-31 augp=1.0e-31 material material=AlGaN taun0=1e-8 taup0=1e-8 copt=1.1e-8 \ augn=1.0e-31 augp=1.0e-31 material material=InAlN taun0=1e-8 taup0=1e-8 copt=1.1e-8 \ augn=1.0e-31 augp=1.0e-31 material material=InAlGaN taun0=1e-8 taup0=1e-8 copt=1.1e-8 \ augn=1.0e-31 augp=1.0e-31 # material well.gamma0=30e-3 # material material=GaN edb=0.013 eab=0.17 material name=npregion edb=0.013 eab=$Al_np*0.35+(1-$Al_np)*0.17 material region=3 edb=0.013 eab=$Al_EBL*0.35+(1-$Al_EBL)*0.17 material name=barrier edb=0.013 eab=$Al_b*0.35+(1-$Al_b)*0.17 material name=barrier_In edb=0.013 eab=$Al_In*0.35+(1-$Al_In)*0.17 # models k.p fermi incomplete consrh auger optr print models name=well k.p chuang spontaneous lorentz # mobility material=GaN mun0=350 mup0=15 mobility material=AlGaN mun0=250 mup0=5 mobility material=InAlN mun0=300 mup0=10 # output con.band val.band band.param charge polar.charge e.mobility h.mobility \ u.srh u.radiative u.auger permi # solve init # tonyplot # method climit=1e-4 maxtrap=500 #block nblockit=50 # solve prev # save outf=ledex02_1.str # probe name="Radiative" integrate radiative rname=well probe name="Recombination" integrate recombination # log outf=ledex02.log solve vstep=0.5 vfinal=5.5 name=anode save outf=ledex02_5p64.str save spectrum=ledex02_5p64.spc lmin=0.255 lmax=0.450 nsamp=200 solve vstep=0.5 vfinal=6.0 name=anode save outf=ledex02_6p0.str 以上程序可以运行就是出来的输出功率，功率谱密度的曲线数据不行（光电性能不行），改哪些变量可以提升，我需要出现明显提升效果，我自己调的的只有很小的提升尽量不改动结构。

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