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Principles of Lithography -2下载
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2019-07-08 02:00:21
Principles of Lithography -2
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Principles of Lithography -2下载
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Principles
of
Lithography
-4
Principles
of
Lithography
-4
Principles
of
Lithography
-2
Principles
of
Lithography
-2
principles
of
lithography
-3
principles
of
lithography
光刻原理
Principles
of
Lithography
Lithographers at semiconductor companies are integrators. We combine optics, precision machines, photochemicals, and photomasks into working processes. While chip makers often get the glory, the lens makers, resist chemists, and tool makers are the unsung heroes of the microelectronics revolution. It has also been my good fortune to be able to interact with many of the world’s experts in optics, equipment, and lithographic materials.
Principles
of
Lithography
, Third Edition (SPIE Press Monograph, Vol. PM198)
The publication of
Principles
of
Lithography
, Third Edition just five years after the previous edition is evidence of the quickly changing and exciting nature of
lithography
as applied to the production of integrated circuits and other micro- and nanoscale devices. This text is intended to serve as an introduction to the science of micro
lithography
, but also covers several subjects in depth, making it useful to the experienced lithographer as well. Topics directly related to manufacturing tools are addressed, including overlay, the stages of exposure, tools, and light sources. This updated edition reflects recent advances in technology, including the shift of immersion
lithography
from development into volume manufacturing, and the movement of EUV
lithography
from the lab to development pilot lines. New references and homework problems are included. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.
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